Transmission Electron Microscope (TEM)

  • Detailed description
  • Case Study Sharing
  • Scope of application
  • Equipment Specifications
  • TEM mode corresponding observation content
    • Commodity name: Transmission Electron Microscope (TEM)

    TALOS F200E is a high-end, 200-kilovolt transmission electron microscope manufactured by Thermo Fisher Scientific. It’s not a basic model but rather a powerful, highly integrated analytical TEM platform designed to deliver high-resolution imaging and comprehensive compositional analysis for applications in materials science, nanotechnology, and semiconductor research.

  • High-Resolution TEM Image Analysis

    Under optimal conditions, the TALOS F200E achieves a point resolution as low as <0.25 nm and a line resolution (the information limit) as low as <0.14 nm. This means it can clearly distinguish interplanar spacings smaller than 0.2 nanometers in most crystalline materials.

     

    High-Resolution TEM/EDS Analysis

    The ultimate goal of TEM/EDS analysis in the TALOS F200E is to achieve a perfect match between the structure and composition—truly "what you see is what you get."

     

    3D V-NAND Flash Analysis

    The core feature of 3D NAND is its high aspect-ratio structure, formed by stacking dozens or even hundreds of device layers. The prepared TEM samples typically represent a "cross-section" that includes the entire stack, with noticeable differences in thickness between the upper and lower layers.

     

    LED Epitaxial Structure Analysis

    LED epitaxial structures (such as GaN-based blue LEDs, Micro-LEDs, and more) are highly sensitive to interface quality, material purity, defect density, and compositional fluctuations—issues that F200E excels at addressing.

     

    Stress Analysis

    TALOS F200E doesn’t rely on conventional mechanical testing methods in this regard; instead, it leverages its high-resolution imaging and diffraction capabilities to offer a powerful approach for quantitatively measuring strain at the nanoscale—and even down to the atomic level.

  • Microstructural Analysis (Lattice Imaging)

    Crystal Defect and Lattice Defect (Dislocation) Analysis

    Element Composition Analysis

    Thin Film Stress Analysis

    Electron Diffraction Pattern Analysis

    Impurity and Contaminant Source Analysis

    Automatic Video Measurement Analysis

  • Imagery

    Point Resolution: 0.1 nm
    STEM Resolution: 0.16 nm

    EDS

    Detector: 4 SDD
    Solid angle: 0.9

    Other features

    Piezo stage + DCFI
    4K×4K CCD

  • HRTEM Mode

    Atomic resolution, intuitively displaying the lattice, atomic arrangement, and crystal structure.

     

    STEM (HAADF)

    Z-contrast is easy to interpret, making it ideal for combined use with EDS/EELS—perfect for atomic number contrast and three-dimensional structural analysis.

     

    Bright/Darkfield Image

    Sensitive to crystal defects, including dislocations, grain boundaries, and precipitate phases.

     

    NBED

    Nanoscale diffraction, crystal structure in minuscule regions

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